- Growth and Characterization of Silicon Nanowires by Catalyst Assisted LPCVD

Over the past few years there has been a considerable effort toward the synthesis of nanowires, mostly based on the metal catalyst assisted Vapour-Liquid-Solid (VLS) growth mechanism. Even though significant advances have been made on the synthesis of nanowires, some fundamental questions remain on growth control, structural and electrical properties. Silicon nanowires (SiNWs) are grown on silicon (111) and (100) substrates in a Low Pressure Chemical Vapour Deposition (LPCVD) reactor. Silane is used as a reactive gas diluted in hydrogen and could be mixed with HCl for selective growth process. Gold is main used as a catalyst, but we studies also different metals.

 

Maj : 19/10/2016 (291)

 

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